


Geometric Effects When Measuring Small Holes With Micro ...
1. Introduction. In recent years there has been much interest in the measurement of micro-features—with characteristic dimensions on the order of 100 μm or less—using coordinate measuring machines (CMMs) [].Often there is a need to measure a micro-hole using a probe that is nearly as big as the hole, with very little clearance between the probe tip and the side of the hole.
